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Planar test structures for characterizing impurities in silicon
Home
Publications
Planar test structures for characterizing impurities in silicon
Planar test structures for characterizing impurities in silicon
MB
M G Buchler
M G Buchler
JD
J M David
J M David
RM
R L Mattis
R L Mattis
WP
W E Phillips
W E Phillips
WT
W R Thurber
W R Thurber
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1 January 1976
report
Published by
National Institute of Standards and Technology (NIST)
https://doi.org/10.6028/nbs.sp.400-21
Abstract
No abstract available
Cited by 1 article