As-deposited LiCoO2 thin film cathodes prepared by rf magnetron sputtering
- 10 October 2005
- journal article
- Published by Elsevier BV in Electrochimica Acta
- Vol. 51 (2), 268-273
- https://doi.org/10.1016/j.electacta.2005.04.035
Abstract
No abstract availableKeywords
This publication has 25 references indexed in Scilit:
- Characteristics of rapid-thermal-annealed LiCoO2 cathode film for an all-solid-state thin film microbatteryJournal of Vacuum Science & Technology A, 2004
- Lithium cobalt oxide cathode film prepared by rf sputteringJournal of Power Sources, 2004
- Texture and Microstructure Development of RF Sputter-Deposited Polycrystalline Lithium Transition Metal Oxide Thin FilmsJournal of the Electrochemical Society, 2003
- Plasma Treatments for the Low Temperature Crystallization of LiCoO[sub 2] Thin FilmsJournal of the Electrochemical Society, 2001
- Crystallographically Oriented Thin-Film Nanocrystalline Cathode Layers Prepared Without Exceeding 300°CJournal of the Electrochemical Society, 2001
- Structural Analysis of Submicrometer LiCoO[sub 2] FilmsJournal of the Electrochemical Society, 2001
- Preferred Orientation of Polycrystalline LiCoO[sub 2] FilmsJournal of the Electrochemical Society, 2000
- Substrate Effect on the Microstructure and Electrochemical Properties in the Deposition of a Thin Film LiCoO[sub 2] ElectrodeElectrochemical and Solid-State Letters, 1999
- Characterization of Thin‐Film Rechargeable Lithium Batteries with Lithium Cobalt Oxide CathodesJournal of the Electrochemical Society, 1996
- Thin-film rechargeable lithium batteriesJournal of Power Sources, 1995