SIMS, RBS and glancing incidence X-ray diffraction studies of thermally annealed Ru/β-SiC interfaces
- 29 March 2003
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 211 (1-4), 300-307
- https://doi.org/10.1016/s0169-4332(03)00255-1
Abstract
No abstract availableThis publication has 13 references indexed in Scilit:
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