Broadband nanoelectromechanical phase shifting of light on a chip
- 10 February 2014
- journal article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 104 (6)
- https://doi.org/10.1063/1.4864257
Abstract
We demonstrate an optomechanical phase shifter. By electrostatically deflecting the nanofabricated mechanical structure, the effective index of a nearby waveguide is changed and the resulting phase shift is measured using an integrated Mach-Zehnder interferometer. Comparing to thermo-optical phase shifters, our device does not consume power in static operation and also it can operate over large frequency, wavelength, and power ranges. Operation in the MHz range and sub-$\mu$s pulses are demonstratedKeywords
Funding Information
- NSF (DMR 1119826)
This publication has 28 references indexed in Scilit:
- Waveguide integrated low noise NbTiN nanowire single-photon detectors with milli-Hz dark count rateScientific Reports, 2013
- A microelectromechanically controlled cavity optomechanical sensing systemNew Journal of Physics, 2012
- Mechanical systems in the quantum regimePhysics Reports, 2012
- High-speed and high-efficiency travelling wave single-photon detectors embedded in nanophotonic circuitsNature Communications, 2012
- Silicon optical modulatorsNature Photonics, 2010
- Time-domain control of ultrahigh-frequency nanomechanical systemsNature Nanotechnology, 2008
- Thermo-optic tuning and switching in SOI waveguide Fabry-Perot microcavitiesOptics Express, 2007
- Active control of slow light on a chip with photonic crystal waveguidesNature, 2005
- Micrometre-scale silicon electro-optic modulatorNature, 2005
- Sub-$muhboxs$Switching Time in Silicon-on-Insulator Mach–Zehnder Thermooptic SwitchIEEE Photonics Technology Letters, 2004