OMCVD of transition metals and their silicides using metallocenes and (di) silane or silicon tetra-bromide
- 1 February 1991
- journal article
- Published by Elsevier BV in Journal of Crystal Growth
- Vol. 108 (3-4), 806-816
- https://doi.org/10.1016/0022-0248(91)90261-3
Abstract
No abstract availableThis publication has 27 references indexed in Scilit:
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