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Limits of low-energy electron optics
Home
Publications
Limits of low-energy electron optics
Limits of low-energy electron optics
LH
Laurence S. Hordon
Laurence S. Hordon
ZH
Zhirong Huang
Zhirong Huang
NM
Nadim Maluf
Nadim Maluf
RB
Ray Browning
Ray Browning
RP
R. Fabian W. Pease
R. Fabian W. Pease
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1 November 1993
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Vol. 11
(6)
,
2299-2303
https://doi.org/10.1116/1.586894
Abstract
No abstract available
Cited by 9 articles