Influence of Subsurface Hybrid Material Growth on the Mechanical Properties of Atomic Layer Deposited Thin Films on Polymers
- 16 May 2013
- journal article
- research article
- Published by Wiley in Chemical Vapor Deposition
- Vol. 19 (4-6), 134-141
- https://doi.org/10.1002/cvde.201207042
Abstract
No abstract availableKeywords
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