Low cost quartz resonant accelerometer for aircraft inertial navigation

Abstract
A low-cost quartz resonator accelerometer was constructed using photolithography to fabricate precision components. The device was tested to establish key resolution, stability, and isolation factors. The cost of the instrument in production volume is expected to be about $200/unit for a performance level of 50 mu g. This accelerometer with appropriate packaging and other minor adaptations can be made suitable for aircraft inertial navigation.