Ion-induced conversion of polysiloxanes and polycarbosilanes into ceramics: Mechanisms and properties
- 1 May 1998
- journal article
- Published by Elsevier BV in Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
- Vol. 141 (1-4), 652-662
- https://doi.org/10.1016/s0168-583x(98)00158-x
Abstract
No abstract availableKeywords
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