Nondestructive depth profiling of ZnS and MgO films by spectroscopic ellipsometry
- 1 July 1987
- journal article
- Published by Optica Publishing Group in Optics Letters
- Vol. 12 (7), 456-458
- https://doi.org/10.1364/ol.12.000456
Abstract
Spectroscopic ellipsometric (SE) measurements followed by linear-regression analysis of the SE data obtained on ZnS and MgO films on vitreous silica substrates reveal the distribution of voids (or low-density regions) in these transparent thin films.Keywords
This publication has 16 references indexed in Scilit:
- Nondestructive depth profiling by spectroscopic ellipsometryApplied Physics Letters, 1985
- Surface preparation and characterization by spectroellipsometry: Application to (100)GaAsJournal of Vacuum Science & Technology A, 1985
- Unambiguous determination of thickness and dielectric function of thin films by spectroscopic ellipsometryThin Solid Films, 1984
- Automatic determination of the optical constants of inhomogeneous thin filmsApplied Optics, 1982
- Investigation of effective-medium models of microscopic surface roughness by spectroscopic ellipsometryPhysical Review B, 1979
- Moisture penetration patterns in thin filmsThin Solid Films, 1976
- Refractive Indexes of Single Synthetic Zinc Sulfide and Cadmium Sulfide Crystals*Journal of the Optical Society of America, 1957
- The form birefringence of macromoleculesActa Crystallographica, 1953
- Refractive Index and dispersion of distilled water for visible radiation, at temperatures 0 to 60 degrees CJournal of Research of the National Bureau of Standards, 1938
- Berechnung verschiedener physikalischer Konstanten von heterogenen Substanzen. I. Dielektrizitätskonstanten und Leitfähigkeiten der Mischkörper aus isotropen SubstanzenAnnalen der Physik, 1935