Epitaxially Grown Diamond (001) 2×1/1×2 Surface Investigated by Scanning Tunneling Microscopy in Air
- 1 May 1991
- journal article
- Published by IOP Publishing in Japanese Journal of Applied Physics
- Vol. 30 (5R), 1063
- https://doi.org/10.1143/jjap.30.1063
Abstract
Scanning tunneling microscopy (STM) observation was performed for the surface of diamond epitaxial film which was grown on a diamond (001) substrate by microwave plasma-assisted chemical vapor deposition (CVD). The surface was stable even in air, and it showed a reflection high-energy electron diffraction (RHEED) pattern of the 2×1/1×2 structure. Images of the atomic level corresponding to the RHEED pattern were obtained by STM in air. Significant extension of dimer rows was observed over the entire surface. Strong similarity between Si(001) grown by molecular beam epitaxy (MBE) and diamond (001) grown by CVD was shown.Keywords
This publication has 11 references indexed in Scilit:
- Epitaxial growth of silicon on Si(001) by scanning tunneling microscopyJournal of Vacuum Science & Technology A, 1990
- Scanning tunneling microscopy study of diffusion, growth, and coarsening of Si on Si(001)Journal of Vacuum Science & Technology A, 1990
- Epitaxial Growth of High Quality Diamond Film by the Microwave Plasma-Assisted Chemical-Vapor-Deposition MethodJapanese Journal of Applied Physics, 1990
- Anisotropic spread of surface dimer openings in the initial stages of the epitaxial growth of Si on Si{100}Physical Review Letters, 1989
- Electrical Characteristics of Metal Contacts to Boron-Doped Diamond Epitaxial FilmJapanese Journal of Applied Physics, 1989
- Characterization of conducting diamond filmsVacuum, 1986
- Vapor Deposition of Diamond Particles from MethaneJapanese Journal of Applied Physics, 1982
- The diamond surface: I. The structure of the clean surface and the interaction with gases and metalsSurface Science, 1977
- Interplay of the monohydride phase and a newly discovered dihydride phase in chemisorption of H on Si(100)2 × 1Physical Review B, 1976
- Structure of autoepitaxial diamond filmsJournal of Crystal Growth, 1975