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Experiments and modeling of a helicon source
Home
Publications
Experiments and modeling of a helicon source
Experiments and modeling of a helicon source
AM
A. W. Molvik
A. W. Molvik
TR
T. D. Rognlien
T. D. Rognlien
JB
J. A. Byers
J. A. Byers
RC
R. H. Cohen
R. H. Cohen
AE
A. R. Ellingboe
A. R. Ellingboe
EH
E. B. Hooper
E. B. Hooper
HM
H. S. McLean
H. S. McLean
BS
B. W. Stallard
B. W. Stallard
PV
P. A. Vitello
P. A. Vitello
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1 May 1996
journal article
Published by
American Vacuum Society
in
Journal of Vacuum Science & Technology A
Vol. 14
(3)
,
984-989
https://doi.org/10.1116/1.580067
Abstract
No abstract available
Keywords
EXPERIMENTS AND MODELING
MODELING OF A HELICON SOURCE
Cited by 17 articles