Characteristics of a Reactively Sputtered Indium Tin Oxide Thin Film Strain Gage for Use at Elevated Temperatures

Publisher Website

1 January 1995

journal article
Published by Springer Science and Business Media LLC in MRS Proceedings

Vol. 403
https://doi.org/10.1557/proc-403-597

Abstract

No abstract available

Keywords

This publication has 3 references indexed in Scilit:

Silicon Sensors as Process Monitoring Devices
Research in Nondestructive Evaluation, 1993
A RESISTANCE STRAIN GAGE WITH REPEATAHLE APPARENT STRAIN TO 800°C
Experimental Techniques, 1991
The electromechanical properties of thin films and the thin film strain gauge
Thin Solid Films, 1974

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