Friction and pull-off force on silicon surface modified by FIB
- 30 November 1996
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 57 (2), 83-89
- https://doi.org/10.1016/s0924-4247(97)80098-2
Abstract
No abstract availableKeywords
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