Fabrication of high aspect ratio microstructure arrays by micro reverse wire-EDM
- 28 June 2005
- journal article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
- Vol. 15 (8), 1547-1555
- https://doi.org/10.1088/0960-1317/15/8/024
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
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