LIGA Technologies and Applications
- 1 April 2001
- journal article
- Published by Springer Science and Business Media LLC in MRS Bulletin
- Vol. 26 (4), 337-340
- https://doi.org/10.1557/mrs2001.76
Abstract
LIGA, an acronym for the German words for lithography, electroplating, and molding, is a technique used to produce micro-electromechanical systems (MEMS) made from metals, ceramics, or plastics. The LIGA process utilizes x-ray synchrotron radiation as a lithographic light source. Highly collimated, high-energy x-rays from the synchrotron impinge on a patterned mask in proximity to an x-ray-sensitive photoresist, typically poly(methyl methacrylate) (PMMA).Keywords
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