Mechanisms, models and methods of vapor deposition
Top Cited Papers
- 31 December 2001
- journal article
- review article
- Published by Elsevier BV in Progress in Materials Science
- Vol. 46 (3), 329-377
- https://doi.org/10.1016/s0079-6425(00)00009-8
Abstract
No abstract availableKeywords
This publication has 93 references indexed in Scilit:
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