Linear interpolation of periodic error in a heterodyne laser interferometer at subnanometer levels (dimension measurement)
- 1 April 1989
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Instrumentation and Measurement
- Vol. 38 (2), 552-554
- https://doi.org/10.1109/19.192345
Abstract
Heterodyne laser interferometry and its accuracy at subnanometer levels are discussed. The simplest optical nonpolarization heterodyne interferometer is tested experimentally to understand and reduce fringe distortion. An accuracy of 0.1 nm for the 633-nm He-Ne laser interferometer is achieved.< >Keywords
This publication has 5 references indexed in Scilit:
- Non-linearity in length measurement using heterodyne laser Michelson interferometryJournal of Physics E: Scientific Instruments, 1987
- Residual errors in laser interferometry from air turbulence and nonlinearityApplied Optics, 1987
- A New Optical Interferometer for Absolute Measurement of Linear Displacement in the Subnanometer RangeJapanese Journal of Applied Physics, 1983
- Absolute Measurement of the (220) Lattice Plane Spacing in a Silicon CrystalPhysical Review Letters, 1981
- X-Ray to Visible Wavelength RatiosPhysical Review Letters, 1973