Self-diffusivity of network oxygen in vitreous SiO2
- 1 December 1984
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 45 (11), 1187-1189
- https://doi.org/10.1063/1.95086
Abstract
Secondary ion mass spectrometry was used to profile the interdiffusion of network oxygen in a Si 16O2‐Si 18O2 thin‐film structure. The diffusivity from 1200 to 1400 °C can be described by D=2.6 cm2 s−1 exp (−4.7 eV/kT). The diffusivity values are lower, but with a higher activation energy, than those previously reported in the literature and approach the intrinsic diffusivity uncomplicated by extrinsic gas phase isotope exchange reactions.Keywords
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