The application of the capacitor's physics to optimize capacitive angular-position sensors
- 1 January 1997
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Instrumentation and Measurement
- Vol. 46 (1), 8-14
- https://doi.org/10.1109/19.552149
Abstract
The distributions of the potential and charge density in a capacitive angular-position sensor with three electrode disks in an axis-symmetrical configuration have been found by creating a suitable physical model and solving Laplace's equation. The influences of geometrical parameters on the nonlinearity, which originates from the electric-field-bending effect, are discussed in detail for a capacitive angular-position sensor. The approximately analytical results are verified by a numerical analysis and are found to be very useful to predict the influences of geometrical nonidealities. The calculations are experimentally verified by us- ing a novel, absolute angular-position sensor with a nonlinearity of less than 17 and 50 over measurement ranges of 15 and 90 , respectively.Keywords
This publication has 4 references indexed in Scilit:
- AN ABSOLUTE CAPACITIVE POSITION TRANSDUCER FOR LITHOGRAPHY.Published by Elsevier BV ,1993
- A low-cost, smart capacitive position sensorIEEE Transactions on Instrumentation and Measurement, 1992
- Application of capacitance techniques in sensor designJournal of Physics E: Scientific Instruments, 1986
- Multi-terminal capacitor sensorsJournal of Physics E: Scientific Instruments, 1982