Fabrication of microfluidic channels with a circular cross section using spatiotemporally focused femtosecond laser pulses

Abstract
We report on the fabrication of hollow microfluidic channels with a circular cross-sectional shape embedded in fused silica by spatiotemporally focusing the femtosecond laser beam. We demonstrate both theoretically and experimentally that the spatiotemporal focusing of femtosecond laser beam allows for the creation of a three-dimensionally symmetric spherical intensity distribution at the focal spot.
Funding Information
  • National Basic Research Program of China (2006CB80600)
  • National Natural Science Foundation of China (NSFC)
  • Chinese Academy of Sciences (CAS)