From thin film to bulk 3C-SiC growth: Understanding the mechanism of defects reduction
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Open Access
- 1 May 2018
- journal article
- research article
- Published by Elsevier BV in Materials Science in Semiconductor Processing
- Vol. 78, 57-68
- https://doi.org/10.1016/j.mssp.2017.12.012
Abstract
No abstract availableKeywords
Funding Information
- Challenge Project (HORIZON 2020 – NMBP – 720827)
- STAEDTLER Foundation (DS/eh17/12, WW/eh 13/15)
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