Analysis of dual-mode thin film bulk acoustic resonators based on polar c-axis tilted wurtzite gallium nitride
- 1 June 2010
- journal article
- Published by AIP Publishing in Journal of Applied Physics
- Vol. 107 (11)
- https://doi.org/10.1063/1.3427434
Abstract
We present the analytical study of dual-mode thin film bulk acoustic resonators (FBARs) based on wurtzite gallium nitride (GaN) thin films with tilted c-axis orientation. The normal-plane and in-plane electric polarization vector components caused by the titled c-axis orientation induce the coexistence of the thickness longitudinal and thickness shear modes in the thin film resonator. Due to the c-axis orientation dependency of material properties including elastic stiffness, dielectric constants, and piezoelectric coefficients, bulk wave properties of FBARs including acoustic velocity and electromechanical coupling coefficient, and electrical impedance spectra are greatly affected by the tilt angle. It is found that the pure longitudinal mode occurs at θ=0° and 66.4°, and the pure shear mode occurs at θ=42.8° and 90°. In addition, the electromechanical coupling coefficient for thickness shear mode has a maximum value 3.18% at θ=34.2°, which is larger than the maximum value for pure thickness longitudinal mode 2.44% at θ=0°. The calculation results show that FBARs based on tilted c-axis wurtzite GaN thin films are promising for frequency control device design and applications.Keywords
This publication has 21 references indexed in Scilit:
- Immunosensor utilizing a shear mode thin film bulk acoustic sensorSensors and Actuators B: Chemical, 2007
- Shear mode AlN thin film electro-acoustic resonant sensor operation in viscous mediaSensors and Actuators B: Chemical, 2007
- Synthesis of textured thin piezoelectric AlN films with a nonzero C-axis mean tilt for the fabrication of shear mode resonatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2006
- Shear mode coupling and tilted grain growth of AlN thin films in BAW resonatorsIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2006
- Microbalance chemical sensor based on thin-film bulk acoustic wave resonatorsApplied Physics Letters, 2005
- Microwave acoustic materials, devices, and applicationsIEEE Transactions on Microwave Theory and Techniques, 2002
- Thin film bulk acoustic wave filterIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2002
- Materials for bulk acoustic wave (BAW) resonators and filtersJournal of the European Ceramic Society, 2001
- Acoustic wave microsensors. Part IIAnalytical Chemistry, 1993
- Acoustic wave microsensorsAnalytical Chemistry, 1993