Monitoring of Focus Position During Laser Processing based on Plasma Emission
Open Access
- 1 January 2013
- journal article
- Published by Elsevier BV in Physics Procedia
- Vol. 41, 911-918
- https://doi.org/10.1016/j.phpro.2013.03.166
Abstract
No abstract availableKeywords
This publication has 8 references indexed in Scilit:
- Laser Automation and In-process SensingPublished by Springer Science and Business Media LLC ,2010
- Laser-induced breakdown spectroscopy—From research to industry, new frontiers for process controlSpectrochimica Acta Part B: Atomic Spectroscopy, 2008
- Handbook of Laser‐Induced Breakdown SpectroscopyPublished by Wiley ,2006
- Effect of focus position on informational properties of acoustic emission generated by laser–material interactionsApplied Surface Science, 2006
- Concept and operating performance of inspection machines for industrial use based on laser-induced breakdown spectroscopySpectrochimica Acta Part B: Atomic Spectroscopy, 2005
- Real-time control of ultrafast laser micromachining by laser-induced breakdown spectroscopyApplied Optics, 2004
- Energy Dependence of Emission Intensity and Temperature in a LIBS Plasma Using Femtosecond ExcitationApplied Spectroscopy, 2001
- Focus control system for laser weldingApplied Optics, 1997