Recent Progress in Materials Issues for Piezoelectric MEMS
- 6 May 2008
- journal article
- Published by Wiley in Journal of the American Ceramic Society
- Vol. 91 (5), 1385-1396
- https://doi.org/10.1111/j.1551-2916.2008.02421.x
Abstract
No abstract availableKeywords
This publication has 106 references indexed in Scilit:
- Piezoelectric response hysteresis in the presence of ferroelastic 90° domain wallsApplied Physics Letters, 2007
- Dielectric, ferroelectric, and piezoelectric properties of (001) BiScO3–PbTiO3 epitaxial films near the morphotropic phase boundaryJournal of Materials Research, 2004
- Surface micromachined piezoelectric resonant beam filtersSensors and Actuators A: Physical, 2001
- Which PZT thin films for piezoelectric microactuator applications?Integrated Ferroelectrics, 1998
- Piezoelectric thin films for memsIntegrated Ferroelectrics, 1997
- Stability diagram for elastic domains in epitaxial ferroelectric thin filmsPhysics of the Solid State, 1997
- Memory applications based on ferroelectric and high-permittivity dielectric thin filmsMicroelectronic Engineering, 1995
- Force constant and effective mass of 90° domain walls in ferroelectric ceramicsJournal of Applied Physics, 1991
- Thermodynamic theory of the lead zirconate-titanate solid solution system, part III: Curie constant and sixth-order polarization interaction dielectric stiffness coefficientsFerroelectrics, 1989
- Low-temperature growth of piezoelectric AlN film by rf reactive planar magnetron sputteringApplied Physics Letters, 1980