Tribology of diamond-like carbon sliding against itself, silicon nitride, and steel

Abstract

Diamond-like carbon (DLC) films were deposited on (100) silicon wafers and silicon nitride balls by RF plasma-assisted chemical vapor deposition at a pressure of 700 mTorr and a substrate temperature of 360 K. The friction coefficient and the wear rates were measured using a pin-on-disk tribometer in 40% humid and dry air. Friction coefficients are near 0.05 in all cases measured. In dry air, the wear of silicon nitride and steel against DLC is below measurement capability because of a protecting DLC transfer layer, and wear of DLC is 2.5 ± 10⁻⁸ mm³/Nm against silicon nitride and 6.5 ± 10⁻⁹ mm³/Nm against steel. In humid air, the DLC transfer layer does not adhere to the solids, and wear of both bodies is larger. Unmeasurable wear is obtained when DLC slides against itself in humid air; the wear rate is 5 ± 10⁻⁹ mm³/Nm in dry air. These results are interpreted in terms of the properties of a friction-induced transformation of the surface layer of DLC.