Fabrication and characterization of High Q polymer micro-ring resonator and its application as a sensitive ultrasonic detector
Open Access
- 6 January 2011
- journal article
- Published by Optica Publishing Group in Optics Express
- Vol. 19 (2), 861-869
- https://doi.org/10.1364/oe.19.000861
Abstract
Smooth sidewall silicon micro-ring molds have been fabricated using resist reflow and thermal oxidation method. High Q factor polymer micro-ring resonators have been fabricated using these molds. Quality factors as high as 105 have been measured at telecommunication wavelength range. By carefully examining the different loss mechanisms in polymer micro-ring, we find that the surface scattering loss can be as low as 0.23 dB/cm, much smaller than the absorption loss of the polystyrene polymer used in our devices. When used as an ultrasound detector such a high Q polymer micro-ring device can achieve an acoustic sensitivity around 36.3 mV/kPa with 240 μW operating power. A noise equivalent pressure (NEP) is around 88 Pa over a bandwidth range of 1–75 MHz. We have improved the NEP by a factor of 3 compared to our previous best result.This publication has 27 references indexed in Scilit:
- Functional photoacoustic microscopy for high-resolution and noninvasive in vivo imagingNature Biotechnology, 2006
- Optoacoustic imaging using thin polymer étalonApplied Physics Letters, 2005
- Rayleigh scattering, mode coupling, and optical loss in silicon microdisksApplied Physics Letters, 2004
- Ultrahigh-sensitivity wideband Fabry-Perot ultrasound sensors as an alternative to piezoelectric PVDF transducers for biomedical photoacoustic detectionPublished by SPIE-Intl Soc Optical Eng ,2004
- Biochemical sensors based on polymer microrings with sharp asymmetrical resonanceApplied Physics Letters, 2003
- Fabrication and coupling to planar high-Q silica disk microcavitiesApplied Physics Letters, 2003
- Polymer micro-ring filters and modulatorsJournal of Lightwave Technology, 2002
- Protein detection by optical shift of a resonant microcavityApplied Physics Letters, 2002
- Ultrasound detection by using a confocal Fabry–Perot interferometer with phase-modulated lightUltrasonics, 1999
- Miniature optical fibre ultrasonic hydrophone using a Fabry-Perot polymer film interferometerElectronics Letters, 1997