Simulation analysis of dispatching rules for an automated interbay material handling system in wafer fab

Abstract

Here, the performance evaluation of a double-loop interbay automated material handling system (AMHS) in wafer fab was analysed by considering the effects of the dispatching rules. Discrete event simulation models based on SIMPLE++ were developed to implement the heuristic dispatching rules in such an AMHS system with a zone control scheme to avoid vehicle collision. The layout of an interbay system is a combination configuration in which the hallway contains double loops and the vehicles have double capacity. The results show that the dispatching rule has a significant impact on average transport time, waiting time, throughput and vehicle utilization. The combination of the shortest distance with nearest vehicle and the first encounter first served rule outperformed the other rules. Furthermore, the relationship between vehicle number and material flow rate by experimenting with a simulation model was investigated. The optimum combination of these two factors can be obtained by response surface methodology.