Thin Rotary and Linear Ultrasonic Motors Using a Double-Mode Piezoelectric Vibrator of the First Longitudinal and Second Bending Modes

Abstract

This paper deals with thin rotary and linear ultrasonic motors using a double-mode piezoelectric ceramic vibrator; a rectangular plate vibrator of the first longitudinal and second bending modes is utilized. A specific merit of the motors is that their thickness can meet the restriction of 10 mm, which is one of the practical requirements of a light load gearless motor. The rotary motor is intended for application in card forwarding, and the linear motor, in magnetic-head traveling and so on. Construction and characteristics of the motors are described herein.