Large-area high-throughput synthesis of monolayer graphene sheet by Hot Filament Thermal Chemical Vapor Deposition
Open Access
- 21 September 2012
- journal article
- research article
- Published by Springer Science and Business Media LLC in Scientific Reports
- Vol. 2 (1), 682
- https://doi.org/10.1038/srep00682
Abstract
We report hot filament thermal CVD (HFTCVD) as a new hybrid of hot filament and thermal CVD and demonstrate its feasibility by producing high quality large area strictly monolayer graphene films on Cu substrates. Gradient in gas composition and flow rate that arises due to smart placement of the substrate inside the Ta filament wound alumina tube accompanied by radical formation on Ta due to precracking coupled with substrate mediated physicochemical processes like diffusion, polymerization etc., led to graphene growth. We further confirmed our mechanistic hypothesis by depositing graphene on Ni and SiO2/Si substrates. HFTCVD can be further extended to dope graphene with various heteroatoms (H, N, and B, etc.,), combine with functional materials (diamond, carbon nanotubes etc.,) and can be extended to all other materials (Si, SiO2, SiC etc.,) and processes (initiator polymerization, TFT processing) possible by HFCVD and thermal CVD.This publication has 57 references indexed in Scilit:
- Large scale metal-free synthesis of graphene on sapphire and transfer-free device fabricationNanoscale, 2012
- The surface science of graphene: Metal interfaces, CVD synthesis, nanoribbons, chemical modifications, and defectsSurface Science Reports, 2012
- Metal‐Free Growth of Nanographene on Silicon Oxides for Transparent Conducting ApplicationsAdvanced Functional Materials, 2012
- Low-temperature synthesis of graphene on nickel foil by microwave plasma chemical vapor depositionApplied Physics Letters, 2011
- Toward High Throughput Interconvertible Graphane-to-Graphene Growth and PatterningACS Nano, 2010
- Graphene photonics and optoelectronicsNature Photonics, 2010
- Synthesis of Graphene and Its Applications: A ReviewCritical Reviews in Solid State and Materials Sciences, 2010
- Catalyst-Free Growth of Networked Nanographite on Si and SiO2 Substrates by Photoemission-Assisted Plasma-Enhanced Chemical Vapor Depositione-Journal of Surface Science and Nanotechnology, 2009
- The rise of grapheneNature Materials, 2007
- Raman Spectrum of Graphene and Graphene LayersPhysical Review Letters, 2006