Tracking control of piezoelectric actuators
- 8 January 2001
- journal article
- Published by IOP Publishing in Nanotechnology
- Vol. 12 (1), 14-20
- https://doi.org/10.1088/0957-4484/12/1/304
Abstract
This paper deals with a new tracking control method for piezoelectric actuators. When actuating in an open-loop manner, in order to compensate for the creep effect of the piezoelectric transducer as well as hysteresis, a new concept of `voltage creep' is proposed, which is represented by the two parameters V0 and γv. It is shown that these two parameters have the properties of wiping out and congruency, which make it possible to derive parameter values appropriate to control piezoelectric actuators using the Preisach model. Finally, a tracking control experiment of piezoelectric actuators for an arbitrary desired trajectory is performed giving greatly improved results compared to other open-loop actuating methods.Keywords
This publication has 9 references indexed in Scilit:
- Displacement control of piezoelectric element by feedback of induced chargeNanotechnology, 1998
- Modeling hysteresis in piezoceramic actuatorsPrecision Engineering, 1995
- Improvement of scanning accuracy of PZT piezoelectric actuators by feed-forward model-reference controlPrecision Engineering, 1994
- A piezoelectric-drive table and its application to micro-grinding of ceramic materialsPrecision Engineering, 1990
- A micro-positioning tool post using a piezoelectric actuator for diamond turning machinesPrecision Engineering, 1990
- A Simple Way to Reduce Hysteresis and Creep When Using Piezoelectric ActuatorsJapanese Journal of Applied Physics, 1988
- The behavior and calibration of some piezoelectric ceramics used in the STMIBM Journal of Research and Development, 1986
- Improving the linearity of piezoelectric ceramic actuatorsElectronics Letters, 1982
- A macroscopic theory for the existence of the hysteresis and butterfly loops in ferroelectricityFerroelectrics, 1980