On the ductile machining of silicon for micro electro-mechanical systems (MEMS), opto-electronic and optical applications
Top Cited Papers
- 15 January 2001
- journal article
- Published by Elsevier BV in Materials Science and Engineering: A
- Vol. 297 (1-2), 230-234
- https://doi.org/10.1016/s0921-5093(00)01031-5
Abstract
No abstract availableThis publication has 12 references indexed in Scilit:
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