Multiscale roughness in optical multilayers: atomic force microscopy and light scattering
- 1 October 1996
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 35 (28), 5583-5594
- https://doi.org/10.1364/ao.35.005583
Abstract
Optics InfoBase is the Optical Society's online library for flagship journals, partnered and copublished journals, and recent proceedings from OSA conferences.This publication has 12 references indexed in Scilit:
- Light scattering from multilayer optics II Application to experimentJournal of the Optical Society of America A, 1994
- Light scattering from multilayer optics I Tools of investigationJournal of the Optical Society of America A, 1994
- Comparison of surface and bulk scattering in optical multilayersApplied Optics, 1993
- Multiwavelength (045–106 μm) angle-resolved scatterometer or how to extend the optical windowApplied Optics, 1993
- Quantitative Microroughness Analysis down to the Nanometer ScaleEurophysics Letters, 1993
- First-order vector theory of bulk scattering in optical multilayersJournal of the Optical Society of America A, 1993
- Role of interface correlation in light scattering by a multiplayerApplied Optics, 1992
- Relationship of the total integrated scattering from multilayer-coated optics to angle of incidence, polarization, correlation length, and roughness cross-correlation propertiesApplied Optics, 1983
- Light scattering from multilayer optics: comparison of theory and experimentApplied Optics, 1980