Two-dimensional simulation of pattern-dependent oxidation of silicon nanostructures on silicon-on-insulator substrates
- 30 June 2004
- journal article
- Published by Elsevier BV in Solid-State Electronics
- Vol. 48 (6), 1073-1078
- https://doi.org/10.1016/j.sse.2003.12.019
Abstract
No abstract availableKeywords
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