Development of stress-induced curved actuators for a tunable THz filter based on double split-ring resonators
- 18 March 2013
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 102 (11), 111908
- https://doi.org/10.1063/1.4798244
Abstract
Using stress-induced curved cantilevers to form double split-ring resonator (DSRR) in three-dimensional configuration, an electrically tunable microelectromechanical system (MEMS) based out-of-plane metamaterials THz filter is experimentally demonstrated and characterized. While the achieved tunable range for the resonant frequency is 0.5 THz at 20 V bias, quality factor of the resonant frequency is improved as well. This MEMS based THz filter using released DSRR structures shows its potential in tunable metamaterials applications such as sensors, optical switches, and filters.This publication has 21 references indexed in Scilit:
- Polarization dependent state to polarization independent state change in THz metamaterialsApplied Physics Letters, 2011
- Switchable Magnetic Metamaterials Using Micromachining ProcessesAdvanced Materials, 2011
- High performance optical absorber based on a plasmonic metamaterialApplied Physics Letters, 2010
- The Road Ahead for MetamaterialsScience, 2010
- Reconfigurable Terahertz MetamaterialsPhysical Review Letters, 2009
- Magnetically tunable left handed metamaterials by liquid crystal orientationOptics Express, 2009
- Three-dimensional optical metamaterial with a negative refractive indexNature, 2008
- Negative Refraction at Visible FrequenciesScience, 2007
- Active terahertz metamaterial devicesNature, 2006
- Negative Refraction Makes a Perfect LensPhysical Review Letters, 2000