Metallization Studies on Epitaxial 6H-SiC
- 1 January 1992
- book chapter
- Published by Springer Science and Business Media LLC in Springer Proceedings in Physics
Abstract
No abstract availableKeywords
This publication has 5 references indexed in Scilit:
- Ohmic Contacts on β-SiCMRS Proceedings, 1989
- Annealing effects of Al/n-type 6H SiC rectifying contactsIEEE Transactions on Electron Devices, 1987
- Specific contact resistance using a circular transmission line modelSolid-State Electronics, 1980
- AuSiC Schottky barrier diodesSolid-State Electronics, 1974
- Metallization systems for silicon integrated circuitsProceedings of the IEEE, 1969