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Connecting transport AMHS in a wafer fab
Home
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Connecting transport AMHS in a wafer fab
Connecting transport AMHS in a wafer fab
JL
J. T. Lin
J. T. Lin
FW
F. K. Wang
F. K. Wang
CW
C. K. Wu
C. K. Wu
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1 January 2003
journal article
Published by
Taylor & Francis Ltd
in
International Journal of Production Research
Vol. 41
(3)
,
529-544
https://doi.org/10.1080/0020754021000042418
Abstract
[[abstract]]© 2004 Taylor & Francis - Automated material handling system (AMHS) plays a significant role in wafer fabrication. In this paper, a new concept of an automated material handling system in a 300 mm wafer fabrication, called the connecting transport AMHS, is proposed. It can accomplish the wafer moving tasks by using different types of vehicles between bays and, within each bay, by a single system with interconnected lines. In the connecting transport system, the time that is spent waiting for an empty vehicle is eliminated effectively, and the WIP level can be reduced. Four different vehicle types are found and their operational issues are also discussed. Furthermore, three different combinations of vehicles are found and the AMHS for a 300 mm wafer fab can be one of the above three methods, or any mixture of these methods. A simple mathematical model is used to determine the minimum number of vehicles for the different connecting transports.[[department]]工業工程與工程管理學
Keywords
MATHEMATICAL MODEL
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Open Access
Cited by 36 articles