Etching Mechanism of Vitreous Silicon Dioxide in HF-Based Solutions
- 25 April 2000
- journal article
- research article
- Published by American Chemical Society (ACS) in Journal of the American Chemical Society
- Vol. 122 (18), 4345-4351
- https://doi.org/10.1021/ja993803z
Abstract
No abstract availableThis publication has 31 references indexed in Scilit:
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