Enhancement of piezoelectric response of diluted Ta doped AlN
- 9 January 2013
- journal article
- Published by Elsevier BV in Applied Surface Science
- Vol. 270, 225-230
- https://doi.org/10.1016/j.apsusc.2013.01.005
Abstract
No abstract availableKeywords
Funding Information
- National Hi-tech (R&D) project of China (2012AA03Z706)
- National Basic Research Program of China (2010CB832905)
- National Natural Science Foundation of China (50871060, 50772055)
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