RF Passive Components Based on Aluminum Nitride Cross-Sectional Lamé-Mode MEMS Resonators
- 14 November 2016
- journal article
- Published by Institute of Electrical and Electronics Engineers (IEEE) in IEEE Transactions on Electron Devices
- Vol. 64 (1), 237-243
- https://doi.org/10.1109/ted.2016.2621660
Abstract
This paper presents a new class of monolithic integrated RF passive components based on the recently developed aluminum nitride (AlN) MEMS cross-sectional Lamé-mode resonator (CLMR) technology. First, we experimentally demonstrate a 920-MHz CLMR showing the values of electromechanical coupling coefficient (kt2) and quality factor (Qload) in excess of 6.2% and 1750, respectively. To the best our knowledge, the resulting figure of merit (= Q·kt2), in excess of 108, is the highest ever reported for AlN-based piezoelectric resonators using interdigitated metallic electrodes (IDTs) and operating in the same frequency range. Second, we report the measured performance of an 870-MHz ladder filter, synthesized using three degenerate CLMRs. This device shows the values of fractional bandwidth (BW3dB) in excess of 3.8% and an insertion loss of ~1.5 dB. Finally, we report the performance of the first piezoelectric transformer (PT) based on the CLMR technology. This device, dubbed “cross-sectional Lamé-mode transformer,” exploits the high-kt2 of the CLMR technology to achieve high values of open-circuit voltage-gains (Gv) in excess of 39. To the best of our knowledge, such a high Gv-value is the highest ever reported for MEMS-based PTs operating in the microwave frequency range.Keywords
Funding Information
- DARPA MTO under the RF-FPGA Program (N66001-14-1-4011)
- N-ZERO Program (HR0011-15-C-0138)
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