Formation of regular arrays of silicon microspikes by femtosecond laser irradiation through a mask
- 17 March 2003
- journal article
- research article
- Published by AIP Publishing in Applied Physics Letters
- Vol. 82 (11), 1715-1717
- https://doi.org/10.1063/1.1561162
Abstract
We report fabrication of regular arrays of silicon microspikes by femtosecond laser irradiation of a silicon wafer covered with a periodic mask. Without a mask, microspikes form, but they are less ordered. We believe that the mask imposes order by diffracting the laser beam and providing boundary conditions for capillary waves in the laser-melted silicon.Keywords
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