Stability of a new polyimide siloxane film as interlayer dielectrics of ULSI multilevel interconnections
- 25 November 1993
- journal article
- Published by Elsevier BV in Thin Solid Films
- Vol. 235 (1-2), 80-85
- https://doi.org/10.1016/0040-6090(93)90247-m
Abstract
No abstract availableKeywords
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