Rankings
Publications
Sources
Publishers
Scholars
Organizations
About
Login
Register
Home
Publications
A Route to Nanoscopic SiO2 Posts via Block Copolymer Templates
Home
Publications
A Route to Nanoscopic SiO2 Posts via Block Copolymer Templates
A Route to Nanoscopic SiO2 Posts via Block Copolymer Templates
HK
H.-C. Kim
H.-C. Kim
XJ
X. Jia
X. Jia
C. M. Stafford
C. M. Stafford
D. H. Kim
D. H. Kim
TM
T. J. McCarthy
T. J. McCarthy
MT
M. Tuominen
M. Tuominen
CH
C. J. Hawker
C. J. Hawker
T. P. Russell
T. P. Russell
Publisher Website
Google Scholar
Cite
Download
Share
Download
31 May 2001
journal article
research article
Published by
Wiley
in
Advanced Materials
Vol. 13
(11)
,
795-797
https://doi.org/10.1002/1521-4095(200106)13:11<795::aid-adma795>3.0.co;2-1
Abstract
No abstract available
Keywords
BLOCK COPOLYMERS
REACTIVE ION ETCHING (RIE)
SILICON DIOXIDE
THIN FILMS
Cited by 160 articles