A micro-machined piezoelectric flexural-mode hydrophone with air backing: Benefit of air backing for enhancing sensitivity
- 1 September 2010
- journal article
- research article
- Published by Acoustical Society of America (ASA) in The Journal of the Acoustical Society of America
- Vol. 128 (3), 1033-1044
- https://doi.org/10.1121/1.3467757
Abstract
A micro-machined underwater acoustic receiver that utilizes the flexural vibration mode of a silicon thin plate and piezoelectric transduction material was investigated. In particular, air was used as the backing material for the hydrophone in order to improve sensitivity in the audible frequency range. To evaluate the effects of air backing on receiving sensitivity, a transduction model incorporating mechanical/electrical/acoustical design parameters was used in designing a piezoelectric micro-machined hydrophone. The sensitivity and displacement responses of the sensor were simulated using the model for air backing and water backing cases, and the benefit of using air backing to enhance sensitivity was confirmed. The micro-machined piezoelectric transducer was fabricated, assembled in the shape of a hydrophone, and tested to ascertain its characteristics as an underwater sensor. These characteristics, such as frequency response and sensitivity, were measured and compared with the simulated results.This publication has 25 references indexed in Scilit:
- Transducers as HydrophonesPublished by Springer Science and Business Media LLC ,2007
- Recent Progress in Towed Hydrophone Array ResearchIEEE Journal of Oceanic Engineering, 2004
- Towed-Array History, 1917–2003IEEE Journal of Oceanic Engineering, 2004
- Hydroacoustic detection of submarine landslides on Kilauea VolcanoGeophysical Research Letters, 2001
- Potential performance of parametric communicationsIEEE Journal of Oceanic Engineering, 2000
- Solid state MOSFET-based hydrophonePublished by SPIE-Intl Soc Optical Eng ,2000
- Micromachined high frequency ferroelectric sonar transducersIEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 1997
- Modification and deployment techniques for hand-deployed Arctic long-life sonobuoysIEEE Journal of Oceanic Engineering, 1989
- Standard Probe Hydrophone for Acoustic Measurements from 10 Hz to 200 kHzThe Journal of the Acoustical Society of America, 1970
- Standard Hydrophone for the Infrasonic and Audio-Frequency Range at Hydrostatic Pressure to 10 000 psigThe Journal of the Acoustical Society of America, 1970