Large-angle electro-optic laser scanner on LiTaO(3) fabricated by in situ monitoring of ferroelectric-domain micropatterning.
- 1 December 2001
- journal article
- Published by Optica Publishing Group in Applied Optics
- Vol. 40 (34), 6236-6241
- https://doi.org/10.1364/ao.40.006236
Abstract
We report on a horn-shaped electro-optic scanner based on a ferroelectric LiTaO3 wafer that is capable of scanning 632.8-nm light by an unprecedented 14.88° angle for extraordinary polarized light and by 4.05° for ordinary polarized light. The device concept is based on micropatterning ferroelectric domains in the shape of a series of optimized prisms whose refractive index is electric field tunable through the electro-optic effect. We demonstrate what we believe is a novel technique of using electro-optic imaging microscopy for in situ monitoring of the process of domain micropatterning during device fabrication, thus eliminating imperfect process control based on ex situ monitoring of transient currents.Keywords
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