Pneumatic and hydraulic microactuators: a review
- 19 March 2010
- journal article
- review article
- Published by IOP Publishing in Journal of Micromechanics and Microengineering
Abstract
No abstract availableThis publication has 87 references indexed in Scilit:
- Precision manufacturing of key components for an ultra miniature gas turbine unit for power generationMicrosystem Technologies, 2009
- A hybrid surface tension seal for pneumatic and hydraulic microactuatorsMicrosystem Technologies, 2008
- Experimental study on a single particle trap with a pneumatic vibrator matrixMicrofluidics and Nanofluidics, 2008
- Pneumatic gas regulator with cascaded PDMS seal valvesSensors and Actuators A: Physical, 2008
- Concept of a micro finger using electro-conjugate fluid and fabrication of a large model prototypeSensors and Actuators A: Physical, 2007
- A latchable microvalve using phase change of paraffin waxSensors and Actuators A: Physical, 2007
- Pneumatic Microactuator Powered by the Deflagration of Sodium AzideJournal of Microelectromechanical Systems, 2006
- A Reworkable Adhesive-Free Interconnection Technology for Microfluidic SystemsJournal of Microelectromechanical Systems, 2006
- Design of miniature parallel manipulators for integration in a self-propelling endoscopeSensors and Actuators A: Physical, 2000
- Accounting for Elastic Energy Storage in McKibben Artificial Muscle ActuatorsJournal of Dynamic Systems, Measurement, and Control, 1998