A multifunctional silicon-based microscale surgical system
- 15 July 2001
- journal article
- Published by Elsevier BV in Sensors and Actuators A: Physical
- Vol. 91 (3), 351-356
- https://doi.org/10.1016/s0924-4247(01)00607-0
Abstract
No abstract availableThis publication has 4 references indexed in Scilit:
- Silicon Microfabricated Horns for Power UltrasonicsPublished by Institute of Electrical and Electronics Engineers (IEEE) ,2005
- Plasma-Etched Neural ProbesPublished by Transducer Research Foundation Inc. (TRF) ,1996
- Strength characterization of silicon microprobes in neurophysiological tissuesIEEE Transactions on Biomedical Engineering, 1990
- CHARACTERISICS OF POLYSILICON LAYERS AND THEIR APPLICATIONS IN SENSORSPublished by Transducer Research Foundation Inc. (TRF) ,1986