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Deep-UV Chemically Amplified Dissolution-Inhibited Photoresists
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Publications
Deep-UV Chemically Amplified Dissolution-Inhibited Photoresists
Deep-UV Chemically Amplified Dissolution-Inhibited Photoresists
JC
J. V. Crivello
J. V. Crivello
SS
S.-Y. Shim
S.-Y. Shim
BS
B. W. Smith
B. W. Smith
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1 November 1994
journal article
Published by
American Chemical Society (ACS)
in
Chemistry of Materials
Vol. 6
(11)
,
2167-2171
https://doi.org/10.1021/cm00047a043
Abstract
No abstract available
Cited by 11 articles