Use of High Repetition Rate and High Power Lasers in Microfabrication: How to Keep the Efficiency High?
- 1 December 2009
- journal article
- Published by Japan Laser Processing Society in Journal of Laser Micro/Nanoengineering
- Vol. 4 (3), 186-191
- https://doi.org/10.2961/jlmn.2009.03.0008