Transparent electrode properties of cadmium stannate

Abstract

Thin films of semiconducting n‐type cadmium stannate (Cd₂SnO₄) have been coated onto different substrate materials by rf sputtering. The films are transparent in the visible and near‐infrared part of the optical spectrum and electrically conductive. Conductivities as high as 6500 Ω⁻¹ cm⁻¹ have been achieved. Transparent electrode coatings can be prepared which have 1 Ω/square electrical sheet resistance and 85% average optical transmission between 5000 and 6500 Å.